Accepting Orders for the LED Light Source–Equipped New Products “UX-44101SCB / UX-45114SCB” of the UX-4 Series, Full Field Projection Aligner for Wafers

Ushio hereby announces that it will begin accepting orders for “UX-44101SCB” and “UX-45114SCB,” new products equipped with LED light source in the UX-4 Series, full field projection aligner for wafers, starting July 2026.

The UX-4 series is a full field projection aligner that has a proven track record over many years as lithography equipment that enhances production efficiency, primarily for power semiconductors, MEMS sensors, and devices related to the communication and photoelectronic fusion (optical semiconductors.)

In recent years, environmental regulations concerning the use and emission of chemical substances have tightened in the semiconductor industry, impacting the entire sector. Against this backdrop, adoption of LED light sources in lithography equipment has been progressing. However, extending exposure times due to insufficient intensity remains a challenge for layers requiring a high exposure dose.
To address this challenge, based on the solid-state light source design technologies cultivated since its founding, Ushio developed an LED light source unit that achieves intensity equivalent to conventional mercury lamps and has successfully developed the UX-44101SCB and UX-45114SCB, incorporating this LED light source unit. 

As next-generation electronic devices essential to the evolution of IoT, 5G, and mobility drive the demand for larger wafer sizes and higher-precision layers, even processes requiring high exposure dose—such as Bump^※1 and WLP^※2 can achieve high throughput equivalent to conventional mercury lamp equipment. In addition, compared with conventional mercury lamps, the equipment enables instantaneous turn-on and turn-off during exposure, thereby extending the lifetime of the light source and significantly reducing running costs after installation.