Technology, Process and Cost
Murata SCC2000 Series X or Z-Axis Gyro & 3-Axis Accelerometer - Automotive MEMS Combo
By Yole SystemPlus —
Murata’s Second Generation Combo Sensors for Automotive & Harsh Environments
Overview / Introduction
Physical Analysis (SCC2230-E02)
- Physical Analysis Methodology
- Package
Package Characteristics Marking & Pin-out
Package Opening
Package Cross-Section
- ASIC Die
View, Dimensions & Marking
Delayering & Process Identification
Cross-Section
- MEMS Gyro Die
View, Dimensions & Marking
MEMS Gyro Opening
MEMS Gyro Sensing Structure
MEMS Gyro Electrodes
MEMS Gyro Cross-Section
- MEMS Accelerometer Die
View, Dimensions & Marking
MEMS Accelero Structure
MEMS Accelero Opening
MEMS Accelero Cross-Section
Physical Analysis of SCC2230-D08
Physical Analysis of SCC2130-D08
Comparison with Murata’s previous generation SCC1300
Manufacturing Process Flow
- Global Overview
- ASIC Front-End Process
- MEMS Process Flow
- Wafer Fabrication Units
- Packaging Process Flow & Assembly Unit
Cost Analysis
- Yields Hypotheses
- ASIC Front-End Cost
- ASIC Probe Test & Dicing Cost
- ASIC Wafer & Die Cost
- MEMS Gyro Front-End Cost
- MEMS Gyro Front-End Cost per process steps
- MEMS Gyro Probe Test & Dicing Cost
- MEMS Gyro Wafer & Die Cost
- MEMS Accelero Front-End Cost
- MEMS Accelero Front-End Cost per process steps
- MEMS Accelero Probe Test & Dicing Cost
- MEMS Accelero Wafer & Die Cost
- Back-End : Packaging Cost
- Back-End : Final Test & Calibration Cost
- SCC2230 Component Cost
Price Analysis
- Murata Financial Results
- SCC2230 Selling Price Estimation
Murata SCC2000 series sensors are combined accelerometer and gyroscope devices aimed at use in tough environments such as those encountered in automotive and industrial applications. The SCC2000 series has best in class temperature dependency, shock sensitivity and bias stability characteristics and consists of a low-g 3-axis accelerometer with two angular rate sensor options of either X or Z-axis detection.
The SCC2000 series features independent acceleration and angular rate sensing elements manufactured with Murata proprietary High Aspect Ratio (HAR) 3D-MEMS process and using SOI and cavity-SOI (c-SOI) substrates. A single ASIC produced with an advanced BCD process is used.
The acceleration sensing element consists of four acceleration sensitive masses and the angular rate sensing element consists of moving masses that are purposely exited to in-plane drive motion.
The SCC2000 devices are packaged in a SOIC 24-pin premolded plastic housing measuring 15.0×8.5×4.1mm. The combo sensor is compliant to the ISO26262 automotive safety standard and the AEC-Q100 stress test qualification requirements for electronic components used in automotive applications.
SCC2000 series is targeted for applications demanding high stability with tough environmental requirements. Typical applications include: IMUs for highly demanding environments, platform stabilization and control, machine control systems, Electronic Stability Control (ESC), Hill Start Assist (HSA), roll over detection and Navigation systems.
The report includes the analysis of all combo sensors in the SCC2000 series: the SCC2230-E02, SCC2230-D08 and SCC2130-D08. Also a comparison with previous generation SCC1300 series is included.
COMPLETE TEARDOWN WITH:
- Detailed Photos
- Precise Measurements
- Material Analysis
- Manufacturing Process Flow
- Supply Chain Evaluation
- Manufacturing Cost Analysis
- Selling Price Estimation
- Analysis of the complete SCC2000 Series: SCC2230-E0, SCC2230-D08 & SCC2130-D08
- Comparison of SCC2000 series vs. SCC1300 series