Technology, Process and Cost Comparison
Optical MEMS Comparison 2026
Technology, supply chain, and cost comparison of eight optical MEMS for LiDAR, VOA, and optical switch applications from Mirrorcle, RoboSense, O-Net Technologies, Lumentum, Agiltron, Santec, and DiCon Fiberoptics.
SPR26024SCOPE
Analyzed devices
- LiDAR mirror: Mirrorcle A7M20.2, RoboSense M1PG2409
- VOA: O-Net Technologies 1GS-102010, Lumentum MAT826349 Agiltron U 57071, Santec MOVA-HC-1
- OS: DiCon Fiberoptics 603DM0 OE-Photonics V00527
From module/end system
- RoboSense MX LiDAR
- Zvision ML-30s Short-Range LiDAR
PHYSICAL ANALYSIS
- Detailed photos in optical and SEM views
- Precise thickness measurements
- Package opening
- Material identification
Technology
- MEMS:
- Electrostatic actuation
- Electromagnetic actuation
- Electrothermal actuation
- Diode
Type of Analysis
- Optical View
- X-ray View
- SEM View
- EDX View
- Cross-section
- Delayering
MANUFACTURING PROCESS FLOW
- Recreation of manufacturing process flow
- Step by step process flow
Technical analysis
- Module​
- Component​
- Process​
- Wafer​
- Material​
- IP
- Packaging
COST ANALYSIS
- Supply chain evaluation
- Simulation of MEMS wafer and die cost
Type of Analysis
- Raw wafer cost
- Wafer Front-End cost
- Die cost
- Give a general physical analysis of 2 LiDAR mirrors, 4 VOAs, 2 OS based on MEMS technology used for automotive, data centers, and communication purposes.
- Present an overview of the approximate manufacturing process flow for the analyzed optical MEMS.
- Provide a physical and manufacturing cost comparison among the analyzed optical MEMS.
Optical MEMS Market Growth: Key Drivers, Device Comparison, and Competitive Landscape
The optical MEMS market, valued at $1B in 2025, is expected to grow at a 15% CAGR through 2031 (Yole Group, Optical MEMS 2026), driven mainly by MEMS-based optical circuit switches in data centers, automotive LiDAR, and emerging consumer applications such as AR glasses. With rising interest in optical MEMS, Yole Group published a comparative analysis of eight devices integrating optical MEMS, including 2D MEMS mirrors for LiDAR, shutters and 1D mirrors for optical variable attenuators, and 1D/2D mirrors for optical communications, with technologies supplied by Mirrorcle Technologies Inc., RoboSense Technology Co., Ltd, O-Net Technologies (Group) Limited, Lumentum Holdings Inc, Agiltron Inc, Santec Holdings Corporation, DiCon Fiberoptics Inc, Shenzhen OE Photonics Co., Ltd.
The report assesses products from established North American, Japanese, and European players, as well as emerging Chinese companies. It analyzes design, manufacturing, and cost structures, detailing packaging, optical elements, MEMS die integration, and key features, supported by optical/SEM imaging and cross-sections. Results reveal differences in substrates, packaging, MEMS architectures, fabrication methods, dimensions, and cost breakdowns for MEMS dies, probe testing, and dicing.
- Overview
- Company Profile, Supply Chain
- Physical Analysis
- Physical Comparison
- Manufacturing Process Flow
- Cost Comparison
- Related Reports
Mirrorcle Technologies Inc., RoboSense Technology Co., Ltd, O-Net Technologies (Group) Limited, Lumentum Holdings Inc, Agiltron Inc, Santec Holdings Corporation, DiCon Fiberoptics Inc, Shenzhen OE Photonics Co., Ltd., AG Microsystems, Inc., Sai Microelectronics In (SMEI), Teledyne MEMS, Memsright, Science Corporation, MEMSCAP, Silex Microsystems, ZVISION
