Tradeshows & Conferences

SPIE ADVANCED LITHOGRAPHY + PATTERNING 2023

emerging technology in the semiconductor industry

The program of the event will try to solve challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
Each year the community comes together to share and discuss current research, hear the latest breakthroughs, and connect with colleagues.

Yole Group will be part of the program with:

Taguhi YEGHOYAN,
Technology & Market Analyst, Semiconductor Manufacturing

Yole Intelligence par of Yole Group

Tuesday, February 28
Conference Presentation
03:40pm – 04:00pm PST: Photolithography equipment market and technology: State and challenges

ABSTRACT:
Photolithography equipment is the enabler of semiconductor device development. While i-line and DUV equipment replaces Mask Aligners to satisfy the overall miniaturization of More-than-Moore components (Power, RF, MEMS..), Advanced Packaging (AP) elaboration is tormented by multitude of challenges. Indeed, packaging is the limitation to performance of components manufactured with EUV lithography. Hence, AP architectures are flourishing, for which Laser Direct Imaging as well as i-line and DUV patterning are used. In this exciting time, we study photolithography equipment market, ecosystem and technology trends looking in detail into the forecast, market share, supply chain and auxiliary to patterning processes and equipment.

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