Murata IMU SCHA63T-K03 for dynamic inclination sensing

• Murata Manufacturing
• TSMC – the foundry

According to Yole Intelligence, the Micro Electro Mechanical Systems (MEMS) Inertial Measurement Unit (IMU) market for industrial applications is expected to reach more than $130M in 2027. This is mostly driven by Industry 4.0 and warehouse automation mega-trends.                                          

In mining, construction, and automotive industries angles of inclination to the vertical are critical. Murata Manufacturing has developed a new MEMS IMU, the SCHA63T, which is intended for dynamic inclination sensing.

This full reverse costing study provides insights into technology data, manufacturing cost and selling price of the Murata SCHA63T-K03 6-axis IMU. Murata’s SCHA63T-K03 is a combined high performance 3-axis gyroscope and 3-axis accelerometer. It consists of X-, Y-, and Z-axis angular rate sensors and an integrated 3-axis accelerometer manufactured using Murata’s proven capacitive 3D-MEMS technology. Two mixed signal Application Specific Integrated Circuits (ASICs) do signal processing that provides angular rates via flexible digital Serial Peripheral Interface (SPI).

The SCHA63T-K03 device, consisting of six dies in total, is packaged in a Small Outline Integrated Circuit (SOIC) 32-pin pre-molded plastic housing measuring 19.71 mm x 12.23 mm x 4.61 mm.

Murata claims that this new IMU is highly resistant to high mechanical shocks and vibration. It can be used for autonomous off-highway vehicles, dynamic inclination sensing and Global Navigation Satellite Signaling (GNSS) positioning support. The sensor enables solutions for driver assistance systems and automated driving of heavy machines, like construction and agricultural equipment, where it is important to measure position and posture with high accuracy. The device can provide centimeter-level accuracy in machine dynamics and position sensing, and can assist in ensuring safe, robust, and verified design activities. Variants within the same product family are qualified according to the automotive AEC-Q100 standard.

This report provides the detailed optical and scanning electron microscopy (SEM) images of the top and cross-section views of the six dies and a detailed cost analysis of the complete module from substrate to final packaging.

Overview / Introduction

• Executive Summary
• Reverse Costing Methodology
• Glossary

Company Profile & Supply Chain

• Company Profile
• Supply Chain
• Murata SCHA63T – Product Features
• Murata SCHA63T – Typical Applications

Physical Analysis

• Overview
• Packaging
• ASIC_1
• ASIC_2
  • Die Overview & Dimensions
  • Die Delayering
    • Main Blocks Identification & Technology Node
  • Die Cross-Section
• MEMS Dies Summary
  • MEMS_1
  • MEMS_3
  • MEMS_2
  • MEMS_4
    • Die Overview & Dimensions
    • Sensing Area Details
    • Die Cross-Section
    • Process Summary

MEMS Manufacturing Process

• Global Overview & Process Summary
• ASICs
  • Front-End Process Flow
  • Wafer Fabrication Unit
• MEMS
  • MEMS Gyroscope Process Flow
  • MEMS Accelerometer Process Flow
  • Wafer Fabrication Unit
• Packaging
  • Packaging Process Flow
  • Packaging Assembly Unit

Cost Analysis

• Yields Explanations & Hypothesis
• Murata Supply Chain Summary
• Synthesis of the Cost Analysis
• ASICs and MEMS
  • Front-End Cost
  • Back-End 0: Probe Test & Dicing
• Packaging & Final Test Cost
• Component Cost

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Key Features

• Detailed optical and SEM photos
• Precise measurements
• Materials analysis
• Manufacturing process flow
• Supply chain evaluation
• Manufacturing cost analysis
• Selling price estimation

What's new

• Industrial applications: The product is intended for dynamic inclination sensing; is highly resistant to high mechanical shocks and vibration; and can be used for autonomous off-highway vehicles, dynamic inclination sensing and GNSS positioning support.
• For more info, please see these short videos:

SCHA63T 6DoF inertial sensor for industrial application - Video Library| Murata Manufacturing Co., Ltd.

(2) Murata: SCHA63T Series 6-DOF Gyroscope & Accelerometer - YouTube

• The device consists of 6 dies. The Murata SCHA63T-K03 is a combined high performance 3-axis gyroscope and 3-axis accelerometer. It consists of X-, Y-, and Z-axis angular rate sensors and integrated 3-axis accelerometer manufactured using Murata’s proven capacitive 3D-MEMS technology.
• The design of the four MEMS dies is completely new.