AccuStable sensor die in newly-developed ultra-small gage package

SMI (Silicon Microstructures) is proud to present a newly-developed Gage Pressure Sensor. This SM5G Series contains the AccuStableTMSM30 sensor. The SM30 MEMS piezoresistive pressure sensing die allows long-time stability levels for pressure ranges between 5 and 80 PSI.

The industry leading performance is achieved through FEA assisted electro-mechanical design along with advanced MEMS processing in SMI’s captive fabrication facility. These devices have nonlinearity, pressure hysteresis and temperature hysteresis all below 0.2% full scale, and the sensor die has been qualified according to AECQ-100 Grade 0 requirements (-40 to 150°C).

This packaged, uncompensated sensor providing a mV outputs is intended for high volume applications where cost is a critical factor, such as industrial and medical products, e.g. handheld meters, pneumatic gauges, pressure switches or wound therapy, health monitoring, blood pressure and bioreactors. The SM5G can also be driven with a current to minimize the need for compensation over smaller operating temperature ranges.

SMI Sensor die Yole

Pressure Ranges from 5 PSI up to 80 PSI – SO8 Ported Package

It is designed to be surface-mounted on ceramic or PC board substrates by high-volume OEM manufacturers. The SM5G Series is in a verticle ported package. It can be used to sense pressure in a manifold configuration with an O-ring seal. The SM5G Series is shipped in tape & reel.

SMI is a member of the worldwide Elmos Semiconductor Group, offering proven solutions to a range of industries, based on application-specific ICs, sensors and complete microsystems. SMI is an ISO/TS16949:2009 certified premier developer and manufacturer of MEMS-based pressure sensors for a broad range of markets, with over 25 years of experience. SMI’s design, production and quality control processes have enabled it to develop both the most sensitive and smallest MEMS pressure sensors available on the market.