3D-Micromac unveils high-throughput selective laser annealing system for magnetic sensor manufacturing

Tunnel Magnetoresistance (TMR) sensor manufacturer Crocus Technology among first to install new microVEGA™ xMR system for production applications

3D-Micromac, the industry player in laser micromachining and roll-to-roll laser systems for the semiconductor, photovoltaic, medical device and electronics markets, today introduced the first industrial selective laser annealing system for magnetic sensor formation—the microVEGA™ xMR. Incorporating a highly flexible, high-throughput tool configuration with on-the-fly spot and variable laser energy, the microVEGA xMR accommodates both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjusts magnetic orientation, sensor position and sensor dimension—making it an ideal solution for magnetic sensor production.